| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a micromechanic structural member having no defect of a conventional technology. SOLUTION: This manufacturing method comprises processes of preparing base boards 1, 2 and 4 having a front face and a back face, structurizing the front face of the base boards 1, 2 and 4, at least partially covering the structurized front face of the base boards 1, 2 and 4 with germanium containing protective layers 7, 7' and 7", structurizing the back face of the base boards 1, 2 and 4, and at least partially removing the germanium containing protective layers 7, 7' and 7" from the structurized front face of the base boards 1, 2 and 4.
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