| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit capable of obstructing the invasion of dust into a guide hole attendant on the movement of a contact probe. SOLUTION: This probe unit 3 is equipped with the needle-shaped contact probe 12 whose tip 12c is brought into contact with a circuit board which is an inspection object; and a holding member 11 having the guide hole H and holding the contact probe 12 in a state energized to the circuit board side while the contact probe 12 is moved along the guide hole H. A recess 11b for separating the circuit board from an edge Ha of the guide hole H is formed on the lower surface 11a of the holding member 11, in a state of the lower surface 11a abutting on the circuit board.
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