METHOD FOR PRODUCING OXIDE FILM FOR BOLOMETER

摘要

PROBLEM TO BE SOLVED: To provide a non-cooling type infrared sensor by bolometer-system having a supersensitivity, and provide a method for producing an oxide film for a bolometer having a large temperature coefficient of electric resistance (TCR) and a method for producing an infrared sensor using the film. SOLUTION: An oxide film for a bolometer having a big temperature coefficient of electric resistance is produced by crystallizing a perovskite-type Mn oxide film at a low temperature of 500 deg.C or less through irradiating a laser rays of 400 nm or less of wavelength after application of an organometallic compound onto an insulating substrate and drying. And an infrared sensor is produced by directly forming a resistance for bolometer onto an insulating substrate using a masking pattern when forming the perovskite-type Mn oxide film.