| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe instrument capable of removing the difficulty in arrangement or fixing to a probe holder and conducting stable electric measurement even with a microelectrode. SOLUTION: This probe instrument 12 for measuring electric characteristics in contact with an electrode of an electronic component is equipped with two probes 13, 14 having measuring terminals 2a, 2b; and a probe base part 15 for supporting the end part of the probe on the opposite side to the measuring terminal. Two probes 13, 14 are electrically insulated each other and assembled to the probe base part, and the measuring terminals 2a, 2b are bundled and deflected outward.
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