摘要 |
PROBLEM TO BE SOLVED: To provide a highly sensitive pressure detector of a small size capable of detecting external pressure accurately without generating dispersion. SOLUTION: In this package for the pressure detector, the first metallized electrode 7 for forming electrostatic capacity is provided in one main face of a ceramic base body 1 mounted with a semiconductor element 3 in the other main face, and a ceramic plate 2 having the second metallized electrode 8 opposed to the first metallized electrode 7 in its inner face is sintered integrally with the ceramic base body 1 in a flexible condition to form a sealed space with the other main face of the ceramic base body 1 therebetween.
|