发明名称 METHODS FOR MANUFACTURE OF SELF-ALIGNED INTEGRALLY GATED NANOFILAMENT FIELD EMITTER CELLS AND ARRAY
摘要 <p>The present invention discloses a new field emitter cell (100) and array consisting of groups of nanofilaments (114) forming emitter cathodes. Control gates are microprocessed to be integrally formed with groups of nanofilament emitter cathodes on a substrate. Groups of nanofilaments are grown directly on the substrate material. As a result, the control gates and groups of nanofilaments are self-aligned with one another.</p>
申请公布号 WO2002078059(A1) 申请公布日期 2002.10.03
申请号 US2001032572 申请日期 2001.10.18
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