发明名称 Method for shaping laminar piezoelectric actuators and sensors and related device
摘要 <p>The present invention is related to a method for manufacturing a laminar piezoelectric, piezostrictive respectively, transducer, either a sensor or an actuator, with in-plane variable apparent piezoelectric, piezostrictive respectively, coefficients (e31, e32), comprising a piezoelectric, piezostrictive respectively, sheet covered on at least one of its faces by an electrode made of a conductive layer, characterised in that said in-plane coefficients (e31, e32) variation is obtained through the patterning of the electrode, by providing said conductive layer with a plurality of internal non-conductive zones. <IMAGE></p>
申请公布号 EP1246267(A1) 申请公布日期 2002.10.02
申请号 EP20010870068 申请日期 2001.03.28
申请人 MICROMEGA DYNAMICS S.A. 发明人 PREUMONT, ANDRE
分类号 B06B1/06;H01L41/047;(IPC1-7):H01L41/047 主分类号 B06B1/06
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