Manufacturing method and apparatus for probe carriers

摘要

Method of manufacture of probe carriers and an apparatus used for the method in which the product of the Reynolds number (Re) and the Weber number (We), calculated from diameter and speed of a droplet of a probe solution, and density and surface tension of the probe solution, is set in the predetermined range: <DF>0.26 x 10<5> ≤ Re . We ≤ 1.10 x 10<5> </DF> In accordance with the present invention, there are achieved high uniformity of the area and shape in each probe arranged on the probe carrier, and less tendency to rebound at impact of the probe solution on the substrate. <IMAGE>