发明名称 |
Verlängerte Torsionshebel-Probe, Raster-Mikroskop, Informations-Aufnahme-Wiedergabe- Vorrichtung |
摘要 |
<p>A probe of torsion lever structure is provided with a flat-plate driving unit formed on a substrate with a gap therebetween, two beams positioned along a straight line parallel to the substrate and rotatably supporting the flat plate-shaped driving unit relative to the substrate, a drive device for driving the flat plate-shaped driving unit, and a tip for information input/output provided at an end of the flat plate-shaped driving unit. The two beams are provided at a position between the end of the flat plate-shaped driving unit and the other end thereof, closer to the other end than the center between the end and the other end of the flat plate-shaped driving unit. &lt;IMAGE&gt;</p> |
申请公布号 |
DE69527904(D1) |
申请公布日期 |
2002.10.02 |
申请号 |
DE1995627904 |
申请日期 |
1995.09.20 |
申请人 |
CANON K.K., TOKIO/TOKYO |
发明人 |
IKEDA, TSUTOMU;KAWASAKI, TAKEHIKO;SHIMADA, YASUHIRO |
分类号 |
G01B21/30;B81B3/00;G01B7/34;G01N27/00;G01N37/00;G01Q60/10;G01Q60/16;G01Q70/08;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;(IPC1-7):G01B7/34 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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