METHOD AND APPARATUS FOR TREATING HALOGEN-CONTAINING EXHAUST GAS

摘要

PROBLEM TO BE SOLVED: To suppress the discharge of harmful gas to the atmosphere by reutilizing gas obtained by removing gas harmful to an apparatus from the mixed gas discharged from exhaust equipment and containing the gas harmful to the apparatus and to reutilize the mixed gas as the protective gas for the exhaust equipment. SOLUTION: The halogen-containing exhaust gas, rare gas and hydrogen donating substance discharged from the exhaust equipment are decomposed by discharge treatment to remove hydrogen halide from the decomposition product and the mixed gas after the hydrogen halide is removed is reutilized as the protective gas for a pump.