METHOD AND DEVICE FOR CONTROLLING OBJECT WITH LASER BEAM, AND METHOD FOR MANUFACTURING LIQUID CRYSTAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for control by which a workpiece is precisely positioned by making use of a light pressure of a laser beam, and to provide a device for control. SOLUTION: The laser beam is emitted from a laser oscillator 1 and reflected on a mirror 17, and a workpiece 3 is irradiated with the laser beam by means of a condenser lens 2. An object 8 which reflects the laser beam is located behind the workpiece, and the magnitudes of the light pressure of the laser beam, the direction, and the torque which act on the workpiece are varied by varying the position of the object which reflects the laser beam, thus the position of the workpiece is controlled.