Structure for generating plasma in a treatment area fed with microwaves from outside feeds in microwaves through an opening in a protective screen effective for microwaves and partly surrounding the treatment area

摘要

A treatment area of microwave-conducting material like quartz glass fits in a microwave-proof casing (1) and is formed by a cylindrical sleeve (2) and top (4) and bottom (3) panels. There is an aluminum sheet as protective screen (5) on the inside of the cylindrical sleeve. In several levels the protective screen has openings (6-9) each broken by fixed links (10).