发明名称 |
Method of manufacturing an electrode for silicon carbide semiconductor |
摘要 |
<p>An ohmic electrode for an SiC semiconductor includes a p-type Si layer formed on the surface of a p-type SiC semiconductor, and a metal silicide layer formed on the surface of the Si layer, the metal silicide layer being formed from a metal silicide such as PtSi. The p-type Si layer is preferably formed from p-type Si having a carrier concentration equal to or higher than that of the aforementioned p-type SiC. Preferably, the ohmic electrode is formed as follows: deposition of Si is performed; deposition of a metal silicide is performed by means of laser ablation; laser irradiation is performed to thereby improve ohmic properties and enhance adhesion between the resultant deposition layer and the p-type SiC semiconductor; and then further deposition of the metal silicide is performed by means of laser ablation.</p> |
申请公布号 |
EP1246252(A2) |
申请公布日期 |
2002.10.02 |
申请号 |
EP20020252154 |
申请日期 |
2002.03.26 |
申请人 |
NGK SPARK PLUG CO., LTD |
发明人 |
NAKASHIMA, KENSHIRO;OKUYAMA;YOKOI, HITOSHI;OSHIMA, TAKAFUMI |
分类号 |
H01L21/28;H01L21/04;H01L29/24;H01L29/45;H01L29/861;(IPC1-7):H01L29/45 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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