发明名称 |
VERBESSERTE POLYARYLENETHERZUSAMMENSETZUNGEN UND VERFAHREN ZU IHRER HERSTELLUNG |
摘要 |
<p>A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350° C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.</p> |
申请公布号 |
DE69620405(T2) |
申请公布日期 |
2002.10.02 |
申请号 |
DE1996620405T |
申请日期 |
1996.06.25 |
申请人 |
ALLIEDSIGNAL INC., MORRISTOWN |
发明人 |
LAU, KREISLER;HENDRICKS, NEIL;WAN, WILLIAM;SMITH, AARON |
分类号 |
C08G65/40;H01L21/56;H01L23/29;H01L23/31;H01L23/532;(IPC1-7):C08G65/40;H01L23/498;C07C39/21;C08L71/00 |
主分类号 |
C08G65/40 |
代理机构 |
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代理人 |
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地址 |
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