发明名称 VERBESSERTE POLYARYLENETHERZUSAMMENSETZUNGEN UND VERFAHREN ZU IHRER HERSTELLUNG
摘要 <p>A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350° C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.</p>
申请公布号 DE69620405(T2) 申请公布日期 2002.10.02
申请号 DE1996620405T 申请日期 1996.06.25
申请人 ALLIEDSIGNAL INC., MORRISTOWN 发明人 LAU, KREISLER;HENDRICKS, NEIL;WAN, WILLIAM;SMITH, AARON
分类号 C08G65/40;H01L21/56;H01L23/29;H01L23/31;H01L23/532;(IPC1-7):C08G65/40;H01L23/498;C07C39/21;C08L71/00 主分类号 C08G65/40
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