Microminiature movable device

摘要

On the top of a central protrusion 81 of a stationary electrode substrate 80 there is formed a stationary electrode 84A. A movable electrode plate 12 is supported at both sides thereof to a support frame 10 through flexures 19 and anchor parts 11. The movable electrode plate 12 is held displaceable vertically to the stationary electrode 12. The marginal edge of the protrusion 81 merges into a sloping face, on which an auxiliary electrode 84B is formed. In the case of separating the movable electrode plate 12 from the stationary electrode 84a, a voltage is applied between them. <IMAGE>