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发明名称
HERSTELLUNG VON GALLIUMNITRID-SCHICHTEN MITTELS LATERALEM KRISTALLWACHSTUM
摘要
申请公布号
DE1138063(T1)
申请公布日期
2002.10.02
申请号
DE19990967152T
申请日期
1999.11.23
申请人
NORTH CAROLINA STATE UNIVERSITY, RALEIGH
发明人
LINTHICUM, J.;GEHRKE, THOMAS;THOMSOM, B.;CARLSON, P.;RAJAGOPAL, PRADEEP;DAVIS, F.
分类号
C30B29/38;C30B25/02;H01L21/20;H01L21/205;H01L33/00;H01S5/323;(IPC1-7):H01L21/20
主分类号
C30B29/38
代理机构
代理人
主权项
地址
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