A unitary flexible microsystem and a method for producing same

摘要

The present invention relates to microsystems having flexibility properties so as to enable folding of the microsystem in any three-dimensional direction. That is, enabling torsional and three-dimensionally non-linearly bending of the microsystem. The present invention provides a flexible three-dimensional microsystem compatible with hostile environments such as encountered within a biological body. In particular, provides a bio-compatible three-dimensional microsystem operational in hostile environments while biological acceptable to biological bodies. The present invention further provides an overall stress stability since forming a unitary structure eliminating stress induced or caused by joining various parts of different materials having different material properties into an assembly. <IMAGE>