发明名称 Semiconductor device and method of fabricating the same
摘要 The semiconductor device has an insulated-gate field-effect transistor (MOS transistor), a bipolar transistor, and a Zener diode. The MOS transistor is formed in a well of a first conductive type (p-type) and has a gate insulation layer, a gate electrode, side wall insulation layers, and second conductive type (n-type) of source and drain regions. The bipolar transistor has the drain region as a collector region, the well as a base region, and an n-type impurity-diffusion layer isolated from the drain region as an emitter region. The Zener diode is formed by the junction of an n-type impurity-diffusion layer continuous with the drain region and a p-type impurity-diffusion layer. The source and drain regions have a silicide layer formed on the surface thereof. A protection layer is formed on the surface of the n-type impurity-diffusion layer of the Zener diode.
申请公布号 US6459139(B2) 申请公布日期 2002.10.01
申请号 US20000727705 申请日期 2000.12.04
申请人 SEIKO EPSON CORPORATION 发明人 WATANABE KUNIO;OKAWA KAZUHIKO
分类号 H01L27/04;H01L21/822;H01L21/8234;H01L21/8238;H01L27/02;H01L27/088;H01L27/092;(IPC1-7):H01L29/00 主分类号 H01L27/04
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