发明名称 |
Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators |
摘要 |
The use of robust substrates on the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of conventional machining techniques to create a new class of micro-machined structures. A particular robust substrate-based micro-machine structure is a capacitive pressure sensor that includes a pressure sensitive diaphragm and an electrode.
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申请公布号 |
US6458618(B1) |
申请公布日期 |
2002.10.01 |
申请号 |
US20000697212 |
申请日期 |
2000.10.26 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
ALLEN MARK G.;CHANG SUNG-PIL;LEE JEONG-BONG |
分类号 |
G01L9/00;(IPC1-7):H01L21/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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