发明名称 Pulsing intelligent RF modulation controller
摘要 A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
申请公布号 US6459067(B1) 申请公布日期 2002.10.01
申请号 US20010827880 申请日期 2001.04.06
申请人 ENI TECHNOLOGY, INC. 发明人 VONA, JR. DANIEL J.;RADOMSKI AARON T.;NASMAN KEVIN P.;PULHAMUS, JR. WILLIAM R.
分类号 H05H1/24;G05B19/00;H01J37/32;H03C1/00;H03C1/36;H05H1/46;(IPC1-7):B23K10/00 主分类号 H05H1/24
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