发明名称 Opto-electronic integrated circuit
摘要 An optical electronic integrated circuit comprises: a silicon substrate; an electronic circuit formed in the silicon substrate and processing an electric signal; a ZnO film formed on at least portion of the silicon substrate; and an optical circuit electrically connected to the electronic circuit. The optical circuit includes at least one GaN-based semiconductor compound layer which is provided on the ZnO film, and the GaN-based compound semiconductor layer either receives or emits an optical signal.
申请公布号 US6458614(B1) 申请公布日期 2002.10.01
申请号 US19990272703 申请日期 1999.03.19
申请人 MURATA MANUFACTURING CO., 发明人 NANISHI YASUSHI;KADOTA MICHIO
分类号 H01L21/203;H01L27/144;H01L27/15;H01L31/103;H01L33/12;H01L33/32;H01L33/34;H01S5/02;H01S5/026;H01S5/323;(IPC1-7):H01L21/00 主分类号 H01L21/203
代理机构 代理人
主权项
地址