发明名称 |
Opto-electronic integrated circuit |
摘要 |
An optical electronic integrated circuit comprises: a silicon substrate; an electronic circuit formed in the silicon substrate and processing an electric signal; a ZnO film formed on at least portion of the silicon substrate; and an optical circuit electrically connected to the electronic circuit. The optical circuit includes at least one GaN-based semiconductor compound layer which is provided on the ZnO film, and the GaN-based compound semiconductor layer either receives or emits an optical signal.
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申请公布号 |
US6458614(B1) |
申请公布日期 |
2002.10.01 |
申请号 |
US19990272703 |
申请日期 |
1999.03.19 |
申请人 |
MURATA MANUFACTURING CO., |
发明人 |
NANISHI YASUSHI;KADOTA MICHIO |
分类号 |
H01L21/203;H01L27/144;H01L27/15;H01L31/103;H01L33/12;H01L33/32;H01L33/34;H01S5/02;H01S5/026;H01S5/323;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/203 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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