| 发明名称 |
Process for purifying perfluorinated products |
| 摘要 |
Nitrogen trifluoride (NF3) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. Azeotropic and extractive distillation processes using entraining agents for separating NF3 and PFC-14 from each other and from mixtures with other electronics industry materials are disclosed.
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| 申请公布号 |
US6458249(B2) |
申请公布日期 |
2002.10.01 |
| 申请号 |
US19980189322 |
申请日期 |
1998.11.09 |
| 申请人 |
E. I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
MILLER RALPH NEWTON;KAO CHIEN-PING CHAI;MAHLER BARRY ASHER |
| 分类号 |
B01D3/36;C01B9/08;C01B21/083;C01B21/22;C07C17/38;C07C17/386;C07C19/08;(IPC1-7):B01D3/34;C01B21/04 |
主分类号 |
B01D3/36 |
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代理人 |
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