发明名称 |
Tester for semiconductor devices and test tray used for the same |
摘要 |
An IC tester which is capable of reducing the time required before completion of testing on all of ICs to be tested is provided. The depth (length in the Y-axis direction) of the constant temperature chamber 4 and the exit chamber 5 is expanded by a dimension corresponding approximately to one transverse width (length of the minor edge) of the rectangular test tray 3, and two generally parallel test tray transport paths or alternatively a widened test tray transport path broad enough to transport two test trays simultaneously with the two test trays juxtaposed in a direction transverse to the widened test tray transport path are provided in the section of test tray transport path extending from the soak chamber 41 in the constant temperature chamber 4 through the testing section 42 in the constant temperature chamber 4 to the exit chamber 5 so that two test trays may be simultaneously transported along the two test tray transport paths or the widened test tray transport path.
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申请公布号 |
US6459259(B1) |
申请公布日期 |
2002.10.01 |
申请号 |
US19990254084 |
申请日期 |
1999.02.26 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
ITO AKIHIKO;KOBAYASHI YOSHIHITO;MASUO YOSHIYUKI;YAMASHITA TSUYOSHI |
分类号 |
G01R31/01;G01R31/28;(IPC1-7):B65G43/00 |
主分类号 |
G01R31/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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