| 摘要 |
PURPOSE: A microelectromechanical system(MEMS) switch using a radio frequency(RF) blocking resistor is provided to simplify the structure and to easily integrate the switch, by using the RF blocking resistor instead of an additional blocking capacitor and an RF choke. CONSTITUTION: A semiconductor or dielectric substrate(10) is prepared. A signal line(12) has a gap(18) forming an open circuit, formed on the substrate. An RF ground is located in a position separated from the signal line, formed on the substrate. Anchors(20a,20b) are separated from the signal line, formed on the substrate. A coupling dielectric is formed on the signal line. A transfer member is supported by the upper portion of the anchor, extending over the gap. The transfer member, the signal line and the coupling dielectric constitute a capacitor structure. When a pull-down voltage is applied, the transfer member is downward curved and contacts the signal line to make capacitive coupling. The RF blocking resistor(34) is formed between the signal line and the ground to block radio frequency. An RF blocking unit(32) is formed between a pad(30) formed on the substrate and the anchor to block radio frequency.
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