| 摘要 |
PURPOSE: An error detection apparatus of a magnet driver is provided to reduce errors generated from a manufacturing process by detecting GAUSS generated from a plurality of magnet drivers. CONSTITUTION: A three phase power supply portion(20) applies three phase AC(Alternating Current) power of 208V to the first and the second magnet driver(22,24). The first and the second magnet driver(22,24) output AC power to drive a magnet coil(30). The first and the second magnet driver(22,24) generate GAUSS when receiving a GAUSS generation signal. The first and the second GAUSS detection sensor(26,28) detect the GAUSS generated from the first and the second magnet driver(22,24). Accordingly, a chamber is stopped by an error signal if the GAUSS is not generated from the first and the second magnet driver(22,24).
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