WAFER INSPECTION APPARATUS

摘要

PURPOSE: An apparatus for inspecting a wafer is provided to shorten an inspection time of the wafer without changing a centering of wafer when a stage is tilt. CONSTITUTION: The wafer inspection apparatus comprises a stage(11) having a vacuum chuck for loading a wafer(W) and located in a vacuum chamber(10), a motor(13) for tilt-driving the stage, and an electron gun(15) for irradiating electron-beam to the wafer(W). The wafer inspection apparatus further comprises a stage driving axis(14) for electromotively connecting the stage(11) to the motor(13). The stage driving axis(14) has straight shape.