| 摘要 |
PURPOSE: A field emission device is provided to achieve improved focusing effects by forming the first focusing electrode at the plane same with the gate electrode and forming the second focusing electrode at the insulation layer formed on the gate electrode. CONSTITUTION: A field emission device comprises a gate electrode(242) formed on a first insulation layer(230); a first focusing electrode(244) formed at the plane same with the gate electrode and disposed around the gate electrode; a second insulation layer(260) for insulating the gate electrode and the first focusing electrode; a second focusing electrode(270) deposited on the second insulation layer; an opening formed by sequentially etching the second focusing electrode, second insulation layer, gate electrode and the first insulation layer; and an emitter formed into a cone-shape in the opening.
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