VACUUM SYSTEM FOR SEMICONDUCTOR FABRICATION

摘要

PURPOSE: A vacuum system for semiconductor fabrication is provided to prevent a counter current phenomenon of fluid generated from a state of turning-off of a vacuum pump by using a counter current cutoff valve. CONSTITUTION: An exhaust line(20) is connected with semiconductor fabrication equipment(10). A vacuum pump(30) is used for discharging fluid from the semiconductor fabrication equipment(10) to the exhaust line(20). A counter current cutoff valve(40) is installed in the exhaust line(20). The counter current cutoff valve(40) is operated by a pressure of fluid transferred from the vacuum pump(30) and the exhaust line(20) is closed by the counter current cutoff valve(40) when the vacuum pump(30) is changed a state of turning-on to a state of turning-off. The exhaust line(20) is opened by the counter current cutoff valve(40) when the vacuum pump(30) is in the state of turning-on.