发明名称 SEMICONDUCTOR CHIP AND MANUFACTURING METHOD THEREFOR, SEMICONDUCTOR DEVICE, AND ELECTRONIC APPARATUS USING THE DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce the chip size of a semiconductor chip, and to avoid deterioration of the characteristics of the semiconductor chip. SOLUTION: Respective via-holes 2, piercing through a semiconductor substrate 1, are formed in a gate electrode 7, a source electrode 9, and a drain electrode 12. Embedded metal wirings 3, protruding from a rear surface of the semiconductor substrate 1, are provided in the via holes 2, and protruding electrodes are formed by the embedded metal wirings 3.
申请公布号 JP2002280386(A) 申请公布日期 2002.09.27
申请号 JP20010081758 申请日期 2001.03.21
申请人 SHARP CORP 发明人 SHIRAKAWA KAZUHIKO
分类号 H01L23/52;H01L21/3205;H01L21/338;H01L29/812 主分类号 H01L23/52
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