发明名称 METHOD AND APPARATUS FOR OPTIMIZING OUTPUT BEAM CHARACTERISTIC OF LASER
摘要 PROBLEM TO BE SOLVED: To reduce or eliminate unnecessary wavelength components from laser light by an optical element. SOLUTION: The optical projection system is a laser generator for generating a laser beam containing red light emission and ultraviolet light emission. Also, the optical projection system has the laser generator where a laser includes reflection and output ends, and a wavelength dispersion element that is arranged at the output end and separates the red light emission from the ultraviolet one so that the red and ultraviolet emission advances in a different direction for reducing the presence of the red light emission in the laser beam.
申请公布号 JP2002280651(A) 申请公布日期 2002.09.27
申请号 JP20020052407 申请日期 2002.02.27
申请人 SILICON VALLEY GROUP INC 发明人 BITTENSON STEVEN N
分类号 G03F7/20;G02B5/04;G02B27/12;G02B27/18;H01L21/027;H01S3/00;H01S3/08;H01S3/10;H01S3/225;(IPC1-7):H01S3/225 主分类号 G03F7/20
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