| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that while position control is performed by resolutionΔof a machine position detector, the solution of the inside speed control is made lower than that, and the total position control resolution is limited by the rough resolution of a motor encoder. SOLUTION: In this position control system for controlling the position of a machine 10 by a servo motor 7 and a screw 9, the position of the machine 10 is measured by a linear scale or a laser scale 11, and fed back as a position signal 17 of the position control controller, and the speed of rotation of the motor 7 is measured by using an encoder 8 mounted on the motor 7, and fed back as a rotation speed signal 19 of a motor rotation speed control controller 5 so that this full closed loop position control system can be constituted. In this case, the rotation speed signal 19 is synthesized from the signal 16 of the encoder 8 and a machine position signal 20.
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