发明名称 MIS SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To ensure high current driving power while suppressing a short channel effect of a finely patterned MIS type semiconductor device. SOLUTION: The MIS device comprises source-drain regions 2 and 3 provided in the active region of an Si substrate while being doped heavily with n-type impurities, extensions 6 and 7 extending from the source-drain regions 2 and 3 toward a region beneath a gate electrode 5 while being doped relatively heavily with the n-type impurities, and two threshold level control pockets 12 contiguous to the extensions 6 and 7 and doped with p-type impurities. The upper part of the threshold level control pocket 12 serves as a channel region lightly doped with the p-type impurities. Since the threshold level control pocket 12 does not touch the source-drain regions 2 and 3, junction capacity is reduced and an operating and speed is enhanced.
申请公布号 JP2002280547(A) 申请公布日期 2002.09.27
申请号 JP20010077637 申请日期 2001.03.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HIROKI AKIRA
分类号 H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/78
代理机构 代理人
主权项
地址