发明名称 MANUFACTURING METHOD OF VIBRATOR, FREQUENCY ADJUSTMENT DEVICE AND VIBRATOR
摘要 PROBLEM TO BE SOLVED: To provide an adjustment device that can adjust the resonance frequency of a vibrator at a low cost. SOLUTION: A head 10 is placed opposite to an electrode of a crystal board 3 and minute silver powder solution is jetted from nozzle holes of the head 10 and deposited on the electrode 2. An oscillation circuit 14 detects a resonance frequency of the crystal vibrator 1 to which the silver powder solution is deposited and a discrimination device 16 discriminates whether or not the detected resonance frequency is equal to a prescribed frequency. When the resonance frequency is the prescribed frequency, the frequency adjustment is terminated. On the other hand, when the resonance frequency is higher than the prescribed frequency, the head 10 is shifted and the minute silver powder solution is sequentially deposited to a position of the electrode 2 closer to its circumferential part and the frequency is adjusted furthermore until the resonance frequency reaches the prescribed frequency.
申请公布号 JP2002280855(A) 申请公布日期 2002.09.27
申请号 JP20010076100 申请日期 2001.03.16
申请人 NIKON CORP 发明人 GONDA TSUNEMI
分类号 H03H3/04;(IPC1-7):H03H3/04 主分类号 H03H3/04
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