OPTICAL FUNCTIONAL ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a light emitting element having large light emitting intensity or a photodetecting element having good photodetecting sensitivity, in order to solve the problems of a low light emitting intensity of the emitting element and low photodetecting sensitivity of the photodetecting element. SOLUTION: An optical functional element comprises an amorphous silicon film 5 containing crystal silicon particles 4 and is formed by embedding the film 5 in holes 2 of a porous region 3 formed on a single crystal silicon substrate 1 and heating the film 5.