| 摘要 |
<p>PROBLEM TO BE SOLVED: To carry a plate body without contact by improving holding stability strongly. SOLUTION: This carrier device is provided with a substrate 1 having a holding surface 4 with a flat clearance between the plate body 3 to be held and the substrate 1 held with fluid and without contact, pocket-like cushion chamber 5 arranged at the peripheral part of this surface 4 and provided with a nozzle 6 to be connected with an air space 7 at an upper part, and a fluid suction ort 9 at the center of the surface 4.</p> |
