| 摘要 |
PROBLEM TO BE SOLVED: To supply respective objects uniformly with air by ensuring an air flow having substantially uniform wind speed distribution on the upper surface of a tray. SOLUTION: A first air duct 9 is provided on one side of a tray 1 arranged with an object 7 and a second air duct 11 for supplying air entirely over the upper surface of the tray 1 is provided while being interlocked with the first air duct 9. The same volume of air is supplied from the opposite ends of the first air duct 9 by means of first and second fans 15 and 19 to produce an air flow having substantially uniform wind speed distribution on the upper surface of a tray 1.
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