发明名称 FERROELECTRIC SEMICONDUCTOR STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To solve the problem of a prior art ferroelectric memory that, when a voltage for writing data is applied between a gate metal and a semiconductor, the voltage is not applied effectively to a ferroelectric layer because the voltage is also applied to a buffer layer and thereby the amount of polarization in the ferroelectric layer is small, a polarization state is instable and a data holding time is short. SOLUTION: A capacitor (MFM capacitor) sharing the ferroelectric layer with an MFBS structure and having metals sandwiching bath sides of the ferroelectric layer is placed contiguously to the MFBS structure and a stabilized polarization state formed in the MFM capacitor is utilized for solving the problem.
申请公布号 JP2002280522(A) 申请公布日期 2002.09.27
申请号 JP20010075013 申请日期 2001.03.15
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 SAKAI SHIGEKI;SHUN SHIIBEI
分类号 H01L21/8247;H01L21/8246;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):H01L27/105;H01L21/824 主分类号 H01L21/8247
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