发明名称 |
FERROELECTRIC SEMICONDUCTOR STORAGE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To solve the problem of a prior art ferroelectric memory that, when a voltage for writing data is applied between a gate metal and a semiconductor, the voltage is not applied effectively to a ferroelectric layer because the voltage is also applied to a buffer layer and thereby the amount of polarization in the ferroelectric layer is small, a polarization state is instable and a data holding time is short. SOLUTION: A capacitor (MFM capacitor) sharing the ferroelectric layer with an MFBS structure and having metals sandwiching bath sides of the ferroelectric layer is placed contiguously to the MFBS structure and a stabilized polarization state formed in the MFM capacitor is utilized for solving the problem.
|
申请公布号 |
JP2002280522(A) |
申请公布日期 |
2002.09.27 |
申请号 |
JP20010075013 |
申请日期 |
2001.03.15 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
SAKAI SHIGEKI;SHUN SHIIBEI |
分类号 |
H01L21/8247;H01L21/8246;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):H01L27/105;H01L21/824 |
主分类号 |
H01L21/8247 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|