| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact ion source power supply for a mass spectrometer, that can stably control the emission current of an electron beam generating filament, even when an electron beam monochrometer(EM) comprising a plurality of electrostatic lenses and a deflecting system is installed as a unit for selecting the energy of electron beams, between the electron beam generating filament and an ion source chamber. SOLUTION: EM mode, EI mode and CI mode are provided side by side for switching. In the EM mode, the total emission current of the electron beam generating filament 11 is detected and feedback-inputted to a filament power supply to control a filament current.
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