| 发明名称 |
VACUUM SENSOR |
| 摘要 |
An apparatus and mehtod for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump (25) and them referencing the sensor response to the chamber gas during the evacuation cycle.
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| 申请公布号 |
WO02075281(A1) |
申请公布日期 |
2002.09.26 |
| 申请号 |
WO2002US02923 |
申请日期 |
2002.01.31 |
| 申请人 |
MYKROLIS CORPORATION;PILLION, JOHN, E. |
发明人 |
PILLION, JOHN, E. |
| 分类号 |
G01N1/00;G01N1/24;G01N7/00;G01N19/10;G01N25/56;G01N33/00;(IPC1-7):G01N1/22;E03B5/00 |
主分类号 |
G01N1/00 |
| 代理机构 |
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代理人 |
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