MEMS optical switch including tapered fiber with hemispheric lens

摘要

A method of fabricating a tapered fiber having a hemispheric end i.e. TH fiber, is provided. The TH fiber has high coupling efficiency and low coupling loss, while providing good reproducibility and ease of fabrication. The TH fiber is adapted for MEMS-based switch applications. Also, a method of measuring a beam profile of a fiber is provided. The beam profile measuring technique allows for easy control and manipulation of the fabrication process of the TH fiber.