发明名称 |
Scanning using position transmission for triggering the recording of measured values |
摘要 |
The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.
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申请公布号 |
US2002135782(A1) |
申请公布日期 |
2002.09.26 |
申请号 |
US20010936827 |
申请日期 |
2001.09.18 |
申请人 |
VALENTIN JURGEN;GRIGAT MARCUS;SCHREIER HANS-HERMANN |
发明人 |
VALENTIN JURGEN;GRIGAT MARCUS;SCHREIER HANS-HERMANN |
分类号 |
G01B11/00;G01B21/30;(IPC1-7):G01B11/14 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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