| 摘要 |
An article produced by acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. Articles include a device made from a semiconductor wafer that is cleaned or otherwise processed by acoustic cavitation, a surface having been de-coated by acoustic cavitation, a chemical compound made from a chemical substance reacted by acoustic cavitation, and recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.
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