| 摘要 |
A linear driving device of compact size capable of fundamentally canceling a reactive force produced in acceleration and deceleration of a slider within the linear driving device. A slider and a stator constitute a linear motor. The stator is supported to move linearly on the base by an air bearing and the slider is supported to move linearly on the stator. When the slider is driven by the stator to move in one axial direction, a reactive force is exerted on the stator in an opposite axial direction to move the stator in the opposite direction, so that substantially no force is transmitted from the stator to the base. A ratio of weights of the stator and the slider is lopsided so that motion strokes of these member are different. Since the reactive force produced in acceleration and deceleration is canceled within the linear driving device and is not transmitted to the base, any undesirable effects is caused outside of the linear driving device. This device can be applied to a machining tool or a measuring device to realize a high-speed and high-precision machining or measurement.
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