| 摘要 |
<p>A probing device for measuring the electrical characteristics of a test object (W) comprises a tester, a mounting block, a probe card, a first sensor, a second sensor, and a controller. The mounting block mounts the test object. The test object has a plurality of electric circuit elements formed on the surface thereof. Each electric circuit element has a plurality of electrodes (P) on its surface. The probe card is disposed on the top of the mounting block. The probe card has a plurality of probes (8A). The probes are connected to the tester. The first sensor detects the position of the front ends of the probes. The second sensor detects the surface positions of the individual electric circuit elements. The controller brings the probes of the probe card and the electrodes of the electric circuit element into contact with each other.</p> |
