发明名称 Pressure sensor device
摘要 A pressure sensor device is described that has a diaphragm acted upon by a working medium, on a first side, and a sensor chip, which is disposed on a second side of the diaphragm that is remote from the working medium. There is formed in the sensor chip a measuring bridge having four sensor elements, which form two pairs disposed parallel, and the pairs are disposed at right angles to one another. The sensor elements are disposed such that they are closely spaced apart from one another in the edge region of the sensor chip that faces toward the central point of the diaphragm.
申请公布号 US2002134164(A1) 申请公布日期 2002.09.26
申请号 US20020106146 申请日期 2002.03.26
申请人 ANTE JOHANNES;GEIGER CHRISTIAN;GILCH MARKUS;LANDGRAF HANS-PETER;OTT ANDREAS 发明人 ANTE JOHANNES;GEIGER CHRISTIAN;GILCH MARKUS;LANDGRAF HANS-PETER;OTT ANDREAS
分类号 G01L9/00;(IPC1-7):G01L9/06 主分类号 G01L9/00
代理机构 代理人
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