发明名称 |
Arrangement for generating short-wave ultraviolet radiation has discharge chamber in which ultraviolet radiation is obtained from hydrogen discharge, high vacuum chamber with target object |
摘要 |
The arrangement has a discharge chamber (1) in which ultraviolet radiation is obtained from a hydrogen discharge stimulated by electrons and a high vacuum chamber (2) in which ultraviolet radiation (6) is directed at a target object. A pressure of greater than 10<->2 is present in the discharge chamber and less than 10<->5 in the high vacuum chamber. A passage (3) for ultraviolet radiation is arranged between the chambers.
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申请公布号 |
DE10112379(A1) |
申请公布日期 |
2002.09.26 |
申请号 |
DE20011012379 |
申请日期 |
2001.03.15 |
申请人 |
CARL ZEISS JENA GMBH |
发明人 |
ARDENNE, MANFRED VON |
分类号 |
C12M1/42;G02B21/16;H01J61/70;(IPC1-7):H01J61/70;H01J61/02 |
主分类号 |
C12M1/42 |
代理机构 |
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代理人 |
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地址 |
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