Tri-layer dielectric fuse cap for laser deletion

摘要

A substrate having at least one fuse in a fuse layer. An upper etch-stop layer over the fuse, a lower etch-stop layer having a different etch-chemistry over the fuse and, optionally, a diffusion barrier layer immediately over the fuse. The lower etch-stop later and the optional diffusion barrier providing a uniform passivation thickness for use in conjunction with laser fuse deletion processes. An upper etch-resistant layer over the lower etch-resistant layer and having an etch chemistry selective to that of the lower etch-resistant layer. Methods for providing a uniform passivation thickness over all the fuses, and for deleting such fuses.