| 摘要 |
PURPOSE: To provide a laser of a smaller size and stable output pulse, as well as smaller and stable annealing device, etc. CONSTITUTION: There are provided a master laser 11, which emits a reference laser pulse beam RPref of wavelength 914 nm and pulse width 0.5 ns microlens array 13 which splits the reference laser pulse beam RPref into N units of light optical fiber amplifiers 14-1 to 14-N, whose lengths are sequentially set to have propagation delay time of 0.5 ns, which is the pulse widths of split reference laser pulse beam DRPref1-DRPrefN a third higher harmonic generating device 17, which receives split reference laser pulse beam affected by amplification and delay to generate third higher harmonics TRD1-TRDN of wavelength 305 nm and pulse width 0.5 ns and a lighting optical system 18 where N-pieces of third higher harmonics TRD1-TRDN are provided continuously in parallel for emission with the time being multiplexed. |
