CENTER STORAGE NODE FOR DRAM TRENCH CAPACITORS

摘要

A trench capacitor cell (100), in accordance with the present invention, includes a trench having an outer electrode (110) formed in a substrate adjacent to the trench. A storage node (108) is formed in the trench and capacitively coupled to the outer electrode. A center node (112) is capacitively coupled to the storage node, and the storage node surrounds the center node within the trench. The center node includes a portion extending from the trench for connecting to a potential (P) to provide charge retention in the storage node during operation.