Multistage rotatable actuator

摘要

A multistage actuator for steering a beam of light is disclosed. The multistage actuator includes a movable portion of an actuator drive mechanism, a first rotatable actuator drive mechanism coupled to the movable portion of the actuator drive mechanism, and a second rotatable actuator member coupled to the first rotatable actuator member. The first rotatable actuator member traverses a first angle and the second rotatable actuator member traverses a second angle when the movable portion of the actuator drive mechanism is displaced. An optical element such as a micromirror may be coupled to the second rotatable actuator member or additional actuator stages. An optical subassembly containing a plurality of optical mirrors and multistage rotatable actuators on a substrate is disclosed. Also disclosed is a method and a system for actuating a micromirror assembly.